You might try Olin 777 Etch.  Its NH4F , rather than HF based, and intended
for etching SiO2 over Al contact pads, without attacking the Al.

>>> "Yahong Yao"  11/12/01 09:47PM >>>
Hello Folks,

Is there any etchant which etches oxide fast but does not attack Al?
Thanks a lot.

Yahong

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