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MEMSnet Home: MEMS-Talk: Etch rate question
Etch rate question
2001-11-20
David Marsaut
Etch rate question
David Marsaut
2001-11-20
Dear all,

I'm looking for some information about etch rate of PEW-65 solution (65%
ethanol, 15% KOH)
I need SiO2 and Si rate.

Thanks a lot!

David

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