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MEMSnet Home: MEMS-Talk: Re: WETTING AGENTS
Re: WETTING AGENTS
1996-06-11
Jack W. Judy
1996-06-12
Yohannes ''Johnny'' Desta
1996-06-13
Robert Antaki
1996-06-15
Stephen Gilbert
Re: WETTING AGENTS
Yohannes ''Johnny'' Desta
1996-06-12
On Tue, 11 Jun 1996, Michael Young wrote:
> Dear MEMS,
>           I am currently having problems electroplating small nickel
> features (typically a few microns) through thick photoresist. I am unable
> to get the electroplating solution (Nickel sulphate based) into all the
> resist openings due to the high aspect ratios and small
> dimensions. I would be grateful if anyone could suggest a suitable
> wetting agent to overcome this problem.
>
> Cheers,
>         Mike Young.
>
>
>
Here at LSU, we use Lauryl Sulfate (about 1gram/l) as a wetting agent for
electroplating in high aspect ratio structures. So far we have been to
electroplate 1.8um diameter x 12um height holes. We've also made 10um diameter
x 100um posts.

Yohannes M. Desta
         ____________________________________________________
________|      LSU mSET (microSystems Engineering Team)      |________
\       |     Dept. of Mech. Engr., Baton Rouge LA 709803    |       /
 \      |     PH: (504)388-6602        FAX: (504) 388-5924   |      /
 /      |____________________________________________________|      \
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