Hi all,

I am designing a thermal bimorph using MUMPS. I would like to know whether
POLY2 layer is optional in the design process ? From the MUMPS design
handbook it is apparent that POLY0 layer is optional but I am not too sure
whether POLY2 can be an optional layer.

Also, I am trying to incorporate metal hinges in this design. Is there any
limit on the depth of deposition of the metal layer ? That is, can I
deposit a metal layer 0.5 um thick running down through a gap on all the
layers namely POLY0, POLY1 and POLY2 ?

Thanks for the help !

Rajagopal
--
Dept of Mechanical Engineering
University of Maryland, College Park