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MEMSnet Home: MEMS-Talk: Accelerometers
Accelerometers
2001-11-21
Bhanu
Accelerometers
Bhanu
2001-11-21
Hello All:

I am working on a Resonant Comb (Structured) Accelerometer with a particular
shuttle mass and fixed number of combs. Due to the magnitude of deflection,
the main concern is the capacitance generated and more importantly the
Parasitic Capacitance.

I would appreciate if anyone who has dealt with this issue could refer some
papers or work where this phenomenon has been explained.

Thanks and Happy Holidays!!

Bhanu

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