Hello All:
I am working on a Resonant Comb (Structured) Accelerometer with a particular
shuttle mass and fixed number of combs. Due to the magnitude of deflection,
the main concern is the capacitance generated and more importantly the
Parasitic Capacitance.
I would appreciate if anyone who has dealt with this issue could refer some
papers or work where this phenomenon has been explained.
Thanks and Happy Holidays!!
Bhanu