I do not think that there is a maximum thickness of the oxide layer and
I am aware of limited capabilities to bond with 10um BOX layers, but it
is very difficult to get a good bond and adds a significant level of
stress to the wafers.
Normal SOI vendors will always bond using 1um or even 2um and a few are
using 3um BOX layers in commercial production. A few that I know won't
supply at greater than 2um.

Ken

zhuxiaorui wrote:
>
> Hello,everyone
>
> I want to know what is the maximum oxide layer to SOI wafers.
>
> Please give me relative information.
>
> Thanks
>
>             zhuxiaorui
>             [email protected]

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