Workshop on Electron Beam Lithography for Nanostructure Fabrication

The Network Access Committee of the National Nanofabrication Users
Network will hold a WORKSHOP on Electron Beam Lithography for
Nanostructure Fabrication, at Cornell University on January 14, 2002.
Emphasis will be on the latest advances in nanostructure fabrication
in university laboratories.

This is an informal workshop for the exchange of ideas, results, and
technologies among researchers.  The emphasis will be on technology
that might not be shared at a formal conference yet is critical to
successful fabrication.  The primary audience will be the academic
research staff and senior graduate students at university fabrication
facilities who work in e-beam lithography, although all others are
invited to participate as well.  Mask fabrication by e-beam
lithography is not included but most other applications are.

Topics for discussion will include instrument operation and
characteristics, resist evaluation, pattern specification, exposure
and fabrication schemes, and novel applications.  Both SEM-based and
commercial system lithography are included.  Discussions of
non-microelectronic applications of e-beam lithography are
particularly encouraged.

Technical contributions are solicited from all, on the above listed topics.

This workshop follows prior NNUN workshops on Reactive Ion Etching,
Photolithography, and BioMEMS held in recent years at UCSB, Penn
State, and Stanford, respectively.  They are an outreach effort of
NNUN to promote the exchange of microfabrication techniques within
the academic community.  Considerable information exchange on the
primary topic, as well as general laboratory operation, is expected.
Attendence is limited so please fill out and return the registration
form below by December 14th.

We welcome the participants to the Cornell Nanofabrication Facility
and look forward to an exciting and productive meeting.

Alex Pechenik
Associate Director of CNF
607-255-2329 (ext.102)
[email protected]
*****************************************************************************
Dr. Lynn Rathbun, Laboratory Manager   Voice (607)-255-2329 ext 110
Cornell Nanofabrication Facility                    FAX(607)-255-8601
Knight Laboratory-Cornell University    email   [email protected]
Ithaca, New York 14853                      http://www.cnf.cornell.edu/

Webmaster @ Christian World Adoption  http://www.cwa.org/
Board of Directors, Christian World Adoption
Webmaster @ Joint Council on International. Children's Serv.
http://www.jcics.org
(any opinions or representations of fact re: adoption are my own however)
*****************************************************************************