Hi all,
I am Vittorio Guarnieri, reasercher at IRST (Italy), I am interested in wet
etching for NicKel metal layer. I am evaporating, as a diffusion barrier,
20/30 nm of Ni on silicon wafer substrate, is it possible to have a "soft"
wet etching solution for Ni? I am using also alloy of Ni/Cr and I am
interested also for the wet etch of this kind of material.
Any news will be very good for me.
Thank you
Best regards
Vittorio
Dott. Ing. Guarnieri Vittorio
MicroSystemDivision ITC-Irst
Via Sommarive, 18
38050, Povo, Trento
Italy
tel: +39 0461 314468
fax: +39 0461 314591
[email protected]
