A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Bonding of SiO2 and SiNx wafers
Bonding of SiO2 and SiNx wafers
2001-11-28
jsh021@coes.LaTech.edu
Bonding of SiO2 and SiNx wafers
jsh021@coes.LaTech.edu
2001-11-28
SIR,
    HAS ANYONE BONDED A "SILICON-DI-OXIDE" WAFER WITH A "SILICON NITRIDE"
(LPCVD) WAFER. IF SO CAN YOU PLEASE GIVE ME SOME INFORMATION ON THE PROCESS.

THANKS
javeed shaikh mohammed.

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
The Branford Group
University Wafer
Tanner EDA by Mentor Graphics