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MEMSnet Home: MEMS-Talk: Re :15 um wet oxidation time?
Re :15 um wet oxidation time?
2001-11-29
Koo Myung Kwon
A question about SU8
2001-12-02
alexander li
Re :15 um wet oxidation time?
Koo Myung Kwon
2001-11-29
Thick oxide growing should spend much time.
About 700 hours for 15um wet oxide at 1100 C.
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