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MEMSnet Home: MEMS-Talk: lift-off
lift-off
2001-12-07
Rajsekhar Popuri
2001-12-07
Michael Pedersen
2001-12-07
Rick Williston
2001-12-07
Bruno Wacogne
2001-12-10
Vladimir Gelfandbein
2001-12-07
[email protected]
lift-off
Rajsekhar Popuri
2001-12-07
Hello,

I am trying to do a lift-off.I sputter coated gold-palladium of 2000A
thickness on a glass wafer.When i tried to do a lift-off with
acetone-methanol,gold-palladium layer was completely peeled off the glass
wafer.Can anyone tell me the reason for this and suggest a suitable process
to do a lift-off with gold-palladium.

Thanks in advance
Rajsekhar.




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