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MEMSnet Home: MEMS-Talk: fixture for bonding two wafers at 1000 deg C
fixture for bonding two wafers at 1000 deg C
2001-12-09
[email protected]
2001-12-10
shay kaplan
fixture for bonding two wafers at 1000 deg C
[email protected]
2001-12-09
Sir/Madam,
         In the abscense of a proper bonding equipment; Can anyone tell
me , "How two wafers can be held together in a furnace/oven", to perform
a "Direct bonding process".
   To be more precise, what kind of fixture materials can be used for
temperatures in the range of 1000 deg.C.  If anyone knows any company that
provides these kind of fixtures , please forward the information.

Regards,
javeed shaikh mohammed.

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