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MEMSnet Home: MEMS-Talk: fixture for bonding two wafers at 1000 deg C
fixture for bonding two wafers at 1000 deg C
2001-12-09
jsh021@coes.LaTech.edu
2001-12-10
shay kaplan
fixture for bonding two wafers at 1000 deg C
shay kaplan
2001-12-10
try two quartz (fused silica) photomasks with the chrome stripped off.

shay

jsh021@coes.LaTech.edu wrote:

> Sir/Madam,
>          In the abscense of a proper bonding equipment; Can anyone tell
> me , "How two wafers can be held together in a furnace/oven", to perform
> a "Direct bonding process".
>    To be more precise, what kind of fixture materials can be used for
> temperatures in the range of 1000 deg.C.  If anyone knows any company that
> provides these kind of fixtures , please forward the information.
>
> Regards,
> javeed shaikh mohammed.
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