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MEMSnet Home: MEMS-Talk: Epitaxy on 2" dia silicon wafer
Epitaxy on 2" dia silicon wafer
2001-12-11
Soumen Das
Epitaxy on 2" dia silicon wafer
Soumen Das
2001-12-11
Hi all
I would like to get the information regarding vendor or manufacturer of the
following item
Silicon epitaxy layer on 2 inch diameter <100> orientation silicon wafer.
Type: n on p and p on n
Epitaxy concentration is around 2e15.
Epitaxy thicknes 5, 10 and 20 micron.
Thanks in advance

Dr. Soumen Das
Sr. Scientific Officer
Microelectronics Centre
Dept. of Electronics & ECE
Indian Institute of Technology
Kharagpur 721 302, India
email: [email protected]
Phone: +91-3222-81914 (O)
            +91-3222-81475 (Lab)
            +91-3222-81915 (R)
Fax: +91-3222-755303/777190

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