M. Parameswaran, et al, did some research on Thermal Radiation Detectors using
a CMOS process in the early 90s. They published results in IEEE Circuits and
Devices ("High Level CAD Melds Micromachined Devices with Foundaries" - Nov,
1992) and in IEEE Electron Device Letters ("Micromachined Thermal Rad Emitter
from a Commercial CMOS Process" - Feb, 1991). In those articles, they claim
that EDP will not attack exposed aluminum. I have not found this to be the case
from my experience. Can anyone shed some thermally-emitted light on this
question?

Thanks,
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826
Internet address: [email protected]