Hi

PZT can be etched in ~5% etchant solution to water. the etchant solution
being 3:1 HCl:HF by composition. Before etching this solution (of 5% etchant
and 95% water) can be further diluted to about 25% strength with water.

It should be noted that some groups have used an etchant solution based on
HCl, HF and HNO3 - perhaps this will work better for your needs?


Regards


Richard Haigh

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: 12 December 2001 01:40
To: [email protected]
Subject: [mems-talk] looking for PZT etchant


hi,

does anyone know the etchant for PZT?
thanks in advance.

Kun-lung Yen
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