Hello,

We have used the Wax process several times and it works well. But, I would
be careful about removing the wax with a pirahna clean, as this might remove
your PZT.  You can use Xylene to remove the wax.  Good Luck.

Charles Ellis...
Auburn University Microelectronics Laboratory


----- Original Message -----
From: "Ralph Jih" 
To: 
Sent: Thursday, December 13, 2001 5:53 AM
Subject: [mems-talk] How to protect the PZT thick film in KOH etchant?


> Dear MEMS colleagues,
>
> Does any one know how to protect the PZT thick film(about 30um) in KOH
> ecthant?
> One side of the wafer is the PZT pattern,and the other side is ecthing
> pattern.
> I have tried some methods to avoid it, but fail:
> 1. use nobal metal (Au) to protect PZT --> too expensive, and the Au
> will be etched.
>                                                             Its surface
> profile is like the moon surface.
>                                                         -->NG.
> 2.use thick PR to protect -->  PR will be lifted.
>                                      --> NG.
> 3.use jig to protect PZT --> use two o-rings to protect the wafer and
> locked by screw.
>                                        when the thickness of the wafer
> is thin during the ecthing process,
>                                        the wafer will break.
>                                    --> NG.
>
> Can anyone give some suggestions to solve this problem?
> I will appreciate your response.
>
> Ralph
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