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MEMSnet Home: MEMS-Talk: How to protect Aluminium thin film from KOH solution
How to protect Aluminium thin film from KOH solution
2001-12-13
Jim Intrater -- IE
2001-12-14
Liz Shelley
How to protect Aluminium thin film from KOH solution
Jim Intrater -- IE
2001-12-13
I am assume that the Aluminum is patterned during the etch of
silicon.Photoresist is resistive to KOH if it is not exposed to light.

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