Dear MEMS Talk members,

Any suggestions on a good (positive) photoresist to hold off aqua regia? I
need it to last long enough to etch about 0.25 microns of rhodium. I am not
sure yet about the rhodium etch rate. Probably lower than gold.

Suggestions of an alternative method for etching rhodium are welcome!

Thanks for any help,
Jordan

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Jordan M. Berg, Ph.D., P.E.
Associate Professor of Mechanical Engineering
Texas Tech University
Lubbock, TX 79409-1021

jordan.berg@ttu.edu