hi#,

!!Could any one tell me how to adhere a Si wafer and pyrex glass 7740?!!
What I want to do is bonding my SOI wafer with pyrex glass. Because
there is a middle layer (2000A) of SiO2 I doubt if the anodic bonding works.
And there is a step of etching SiO2 in our anodic bonding process for
cleaning. However i don't want my SiO2 being etched. So I want to glue
them together instead of anodic bonding. The glue must can sustain
up to 200 centigrade.

Thank you very much in advance.

Yongjun Zhao!!!!!!!!!!!!!!!!

!!!!!!!!!!!!!!!!!!!!!!!!!!!!
!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!2001-12-18

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  Yongjun Zhao, Ph.D. Student
  Institute for Micromanufacturing
  Louisiana Tech University
  P.O.Box 10137, 911 Hergot Avenue
  Ruston, LA 71272, USA

  Email: [email protected]
                 [email protected]
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