Hi Lior,

Didn4t you consider to grow your thick Al film by electroplating? I think
it could be the solution for your case if your process enable it.

Best Regards,
Luiz Marangoni
[email protected]



>Hi All,
>I am trying to deposit 20 microns of Aluminum in Evaporation or in
>Sputtering.
>However, the film is very stress (more stress in sputtering).
>Do you know a way to reduce the stress for such films?
>
>
>My Best Regards,
>Lior Grossman; Sales Manager
>B.G. Technical Support Ltd (www.bg-tech.co.il)
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