Try www.hanaoh.com - they bond glass to wafers all the time, but usually for
liquid crystal devices.  If you can find the glue that meets your
requirements, they could probably do it.


----- Original Message -----
From: "zhao" 
To: 
Sent: Tuesday, December 18, 2001 5:43 PM
Subject: [mems-talk] How to adhere si wafer and pyrex glass 7740?


> hi#,
>
> !!Could any one tell me how to adhere a Si wafer and pyrex glass 7740?!!
> What I want to do is bonding my SOI wafer with pyrex glass. Because
> there is a middle layer (2000A) of SiO2 I doubt if the anodic bonding
works.
> And there is a step of etching SiO2 in our anodic bonding process for
> cleaning. However i don't want my SiO2 being etched. So I want to glue
> them together instead of anodic bonding. The glue must can sustain
> up to 200 centigrade.
>
> Thank you very much in advance.
>
> Yongjun Zhao!!!!!!!!!!!!!!!!
>
> !!!!!!!!!!!!!!!!!!!!!!!!!!!!
> !!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!2001-12-18
>
> ***************************************
>   Yongjun Zhao, Ph.D. Student
>   Institute for Micromanufacturing
>   Louisiana Tech University
>   P.O.Box 10137, 911 Hergot Avenue
>   Ruston, LA 71272, USA
>
>   Email: [email protected]
> [email protected]
> ***************************************
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