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MEMSnet Home: MEMS-Talk: [Q] making a cone shape
[Q] making a cone shape
[Q] making a cone shape
2001-12-26
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[Q] making a cone shape
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2001-12-26
[IMAGE] Hi

I want to make circular cone shapes(with metal) on the metal layer
using lift-off process I had asked here before.
(Thanks for many kind andswers! But my explanation was not enough.)
A diameter of the base plane must be about 50um and
the height of the cone must be 75~80um.

The hard points of this method are,

1. to make this shape using lift-off process.
Is it possible to make a suitable structure using
negative photoresist? (75~80um)

2. to make all of the cones' height regular.
I have no experience in lift-off process.
Is it possible to make many cones uniform?

3. to make the structure. How can I make the cones
with Ni(maybe) or its alloy? (ex. sputtering...?)

If you have an ideas, let me know, please.

Thanks.

reply
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