I too can offer small quantities for very competitive rates. What you
may find is that the SiN is not a stock type of item, all of the others
listed, including myself would be using an outside source for this part
of the film deposition and most of the suppliers of SiN have a min batch
charge which can range from $900 for LPCVD Nitride to over $2500 for low
pressure PECVD ( standard PECVD nitride costs are between these two) and
each has a different batch size ranging from 50-75 wafers on LP to 25
wafers on PE.
You do not list the thickness split between the Si02 and SiN , but LPCVD
nitride has a limit of 0.5 um as it becomes to brittle and delaminates
above that level. PE can be applied to 1 um in production runs and
possibly higher in engineering runs. Also note that the PECVD is not a
true Si3N4.
If you might be interested in getting more information, send me your
detailed needs/ specs and I will see what I can offer- I have 3" SSP on
the shelf that could be process with Si02 and Nitride.
Regards,
Ken Smith
Kmbh Associates
4968 Charter Road
Rocklin, CA 95765 U S A
510-714-5055 Efax- 510 217 4421 or 561 658 6136
High Purity Float Zone and Specialty CZ Silicon for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.
Quartz, Glass, Pyrex and Borofloat Wafer Supply.
Greg Miller wrote:
> I have been using this company to get my small order filled- their price
> are very reasonible as well.
>
> Silicon Sense Connecting Technologies
> 110 Daniel Webster Highway
> Nashua, NH 03060-5252
> PH: 603-891-4248
> Fax: 603-891-4264
>
> Good Luck,
>
> Greg Miller
> KVH
> -----Original Message-----
> From: Honggang Jiang [mailto:hgjiang@yahoo.com]
> Sent: Thursday, December 27, 2001 6:09 PM
> To: mems-talk@memsnet.org
> Subject: [mems-talk] silicon wafer with SiO2\SiN passivation layer
>
>
> Dear all:
> I need a small quantity of 3" silicon wafers (either N
> or P doped) passivated with 1 to 1.5 microns thick of
> SiO2\SiN or SiN. I contacted Novawafers, their minimum
> order amounts to thousand dollars. I wonder if anyone
> has some that I can buy. Thanks.
>
> Best regards
>
> Honggang Jiang
> Second Sight, LLC
> 28460 Avenue Stanford Suite 200
> Valencia, California 91355
> Ph: 661 775 3990 ext. 3102 (o)
> Fax: 661 775 3989 (o)
> Email: hgjiang@2-sight.com
> Send your FREE holiday greetings online!
> http://greetings.yahoo.com
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