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MEMSnet Home: MEMS-Talk: silicon wafer with SiO2\SiN passivation layer
silicon wafer with SiO2\SiN passivation layer
2001-12-28
Greg Miller
2001-12-28
Kenneth Smith
2001-12-28
Jon Doe
silicon wafer with SiO2\SiN passivation layer
Jon Doe
2001-12-28
 Hi all:
Is there anybody out there who does deposit Ge doped
oxide on top of thermal oxide as a service? We are
looking for the following stacks:

2 um Ge-Glas on
1-2 um thermal oxide

and

6 um Ge-Glas on
1-2 um thermal oxide

Please let us know.

Happy New Years:

Thomas

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