9:07 AM
  OFFICE MEMO                                                 Time:
                      Subject:
                      Mechanical Properties of SiNx, Au and...        6/26/96
                                                              Date:
Mr. Bolin:
I have found some Young's modulus values for SiNx, Au and Si thin films.

 1. SiNx 290 nm thick, Young's modulus: 222 (+/-) 3 GPa
    Reference: J. J. Vlassak and W. D. Nix, J. of Materials Research,
    Vol 7, No.12 Dec 1992, pp3242-3249.
 2. Au 0.87 micro-meter thick, Young's modulus 57 Gpa.
 3. 3. Si Young's modulus 163 GPa
    Reference for 2 and 3: William D. Nix, "Mechanical Properties of Thin
    Films," Metallurgical Transactions A, Vol. 20A, Nov. 1989, pp 2217-2245.

Also, please put my name on the distribution list of MEMS e-mail.
Thank you.
Dick Chang
Mechanics and Materials Technology Center
The Aerospace Corporation
(310)-336-5808
e_mail: [email protected]