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MEMSnet Home: MEMS-Talk: SiOx Sputtering or Plasma CVD
SiOx Sputtering or Plasma CVD
2002-01-04
Douglas Johnson
SiOx Sputtering or Plasma CVD
Douglas Johnson
2002-01-04
I am looking for a commercial source that can either sputter or plasma CVD
SiOx on a polycarbonate substrate at a thickness of 1000-2000 E.     Please
advise if you know of source.

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