Hi Nickolay,

Anodic Bonding will work if you first oxide the nitride wafer. Voltage
should be higher than 750V and temperature close to 400 degrees

Greets,
Heiko van der Linden

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MESA+ Research Institute
      Twente University
         P.O. Box 217
     7500 AE Enschede
       The Netherlands
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-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Nickolay V. Lavrik
Sent: Wednesday, January 09, 2002 9:08 PM
To: [email protected]
Subject: [mems-talk] nitride to Si bonding?


I know that standard bonding processes are
available for materials such as Si, oxide and
pyrex.

Does any one if similar procedures exist for
reliable (without organic adhesives) permanent
bonding of Si and nitride coated wafers.


Any relevant information will be highly
appreciated

Nickolay
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