> From:          "WLODEK KAPLAN -1023" 
> Organization:  IMC AB
> To:            "CHRISTIAN VIEIDER -1055" 
> Date:          Tue, 2 Jul 1996 13:07:48 CET
> Subject:       (Fwd) MEMS flow sensors
> From:          "John S. Buan" 
> Subject:       MEMS flow sensors
> Date:          Thu, 27 Jun 96 11:21:31 -0500
> To:            [email protected]
> Reply-to:      [email protected]
>
> Hi,
>
>
>   I am looking for a directional flow sensor which has a response time on the
> order of milliseconds and comes in a small package (< 2 mm).  It has to work
in
> a high flow ambient, say 4 liters/sec, but does not have to quantitatively
> measure the flow, just sense directional changes.  Does anyone know of any
> existing products.  Thanks for your time.
>
>
> Sincerely,
>
>
> John Buan
>
> John S. Buan
> Minnesota Innovative
>      Technologies and Instruments Corp.
> 603 Washington Ave. SE  #503
> Mpls., MN 55414-2950
> [email protected]
> phone: (612) 626-1541
> fax:   (612) 625-0558
>
>
>
Hello

We have worked with the development and production of a thermal gas flow
sensor where the sensing part is applied on the top of a thin silicon beam.
The beam is 2 mm long, 0,5 mm wide and 30um thick. Including the
bonding pads the overall size is 3,5 mm x 2,3 mm. The sensor has been
used to measure air flows in the range of 0,05 - 50 m/s with a response time of
25 us. This product has not been designed for directional measurement but
from a research project we have larger sensor chips that can be used.
(6 x 4 x 0,5 mm, see proceedings from Transducers 95 vol 2 pp428)

More detailed information can be given if wanted.


Christian Vieider

IMC-Industrial Microelectronics Center
Isafjordsgatan 22  P.O.Box 1084
S-164 21 KISTA - SWEDEN

Phone +46 8 7521055  Fax +46 8 7505430 e-mail [email protected]