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MEMSnet Home: MEMS-Talk: novel way in ultra-high aspect ratio mems design and fabrication
novel way in ultra-high aspect ratio mems design and fabrication
2002-01-16
lweloff@aol.com
novel way in ultra-high aspect ratio mems design and fabrication
lweloff@aol.com
2002-01-16
Hi all !
I am Dr.P. Sergey Soukhoveev. Recently I have been developed some novel way
in design and fabrication of ultra-high aspect ratio mems devices (nano- and
um scale) by using fiber-glass technologi without any lithography. Right now
I have been developed some different approaches to batch-fabrication of
different microdevices (say for example 3d-dc-micromotors with magnetostatic
bearings, micro-channel mems-devices, actuators for microwings, etc.).
My problem is how to find any help to creat and realize my Programe for
unusel 3d MEMS.
Best Regards
Sergey Soukhoveev

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