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MEMSnet Home: MEMS-Talk: adhesion of TaN to quartz
adhesion of TaN to quartz
2002-01-16
adnan merhaba
2002-01-16
BobHendu@aol.com
adhesion of TaN to quartz
adnan merhaba
2002-01-16
Hi all,

Recently I have been facing some adhesion problems
regarding sputtered TaN film on 5 mil (thick) quartz
substrates. I do not see similar issues when sputtered
on alumina and other ceramics.
Does anyone have any insight to the nature of this
problem and any plausible solution.
thank you,
regards,
adnan
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