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MEMSnet Home: MEMS-Talk: leak test in a sputtering chamber!
leak test in a sputtering chamber!
2002-01-16
adnan merhaba
2002-01-16
Walter Stonas
2002-01-16
[email protected]
leak test in a sputtering chamber!
adnan merhaba
2002-01-16
hi all,
does anybody know of a company that provides services
to detect leak at very high vacuum (10-8 torr) in a
sputtering chamber or does anyone know of a cost
effective method to do the same? We have a He detector
with a mechanical pump, and thus is able to detect
only gross leaks.
Regards,
Adnan
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