Hi,

The equipment you need is a leak checker with rough mechanical pump, turbo
pump and a RGA, residual gas analyizer or other helium  gas sensor. You could
also do a rate of rise test and slowly isolate your system starting from the
chamber and working your way out.

Sincerely,
Walter Stonas
Process Development Engineer

-----Original Message-----
From: adnan merhaba [mailto:[email protected]]
Sent: Wednesday, January 16, 2002 1:02 PM
To: [email protected]
Subject: [mems-talk] leak test in a sputtering chamber!


hi all,
does anybody know of a company that provides services
to detect leak at very high vacuum (10-8 torr) in a
sputtering chamber or does anyone know of a cost
effective method to do the same? We have a He detector
with a mechanical pump, and thus is able to detect
only gross leaks.
Regards,
Adnan
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