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MEMSnet Home: MEMS-Talk: leak test in a sputtering chamber!
leak test in a sputtering chamber!
2002-01-16
adnan merhaba
2002-01-16
Walter Stonas
2002-01-16
BobHendu@aol.com
leak test in a sputtering chamber!
BobHendu@aol.com
2002-01-16
You can attach a mass spec Inficon makes some good ones or you can do it the
old fashioned way and pump and alcohol test using the ion gauges on the
system to show where and when pressure accelerates. One cost a lot the other
takes time.

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