Hello,

I am interested in finding a UHV-compatible (few times 10^(-11) torr)
insulating material that can be spun or printed onto a wafer. Ideally this
would be a commonly used photoresist, but I can't seem to find information on
vacuum properties of these materials.

Thanks for your help!

Dave Kielpinski, Ph.D.
Center for Ultracold Atoms
Massachusetts Institute of Technology

phone: (617) 452-3180
fax: (617) 253-4876