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MEMSnet Home: MEMS-Talk: radius of curvature due to residual stress
radius of curvature due to residual stress
2002-01-17
LEOW Cheah Wei
2002-01-18
Ashish Singh
2002-01-18
Roger Shile
2002-01-19
LEOW Cheah Wei
radius of curvature due to residual stress
LEOW Cheah Wei
2002-01-17
Dear all,

     i understand that in MUMPS process if we deposit metal ontop a
cantilever beam, upon released, it will curl upward.
     can anybody point me to any publication which specific interest in
computing the radius of curvature in this phenomenm? (e.g, paper, text book,
website)
       thank you

LEOW Cheah Wei
postgraduate student
Univerisiti Teknologi Malaysia
http://www.geocities.com/cheah_wei

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