Dear All,

I need some data of surface micromachined mirrors urgently and seek for your
knowledge/experience.

1. the typical refractive index (n) and extinction coefficient (k) of
polysilicon layers
2. the reflectivity (R) and the RMS roughness (sigma) of the mirror surface
after Au coating.

The required data are RMS roughness <15 nm and an ideal reflectivity >0.94. Do
you think these requirement can be met?

Your info is highly appreciated

Dr Jingbo Zhang
From Singapore

>>>  01/17/02 04:29AM >>>
Hi all !
I am Dr.P. Sergey Soukhoveev. Recently I have been developed some novel way
in design and fabrication of ultra-high aspect ratio mems devices (nano- and
um scale) by using fiber-glass technologi without any lithography. Right now
I have been developed some different approaches to batch-fabrication of
different microdevices (say for example 3d-dc-micromotors with magnetostatic
bearings, micro-channel mems-devices, actuators for microwings, etc.).
My problem is how to find any help to creat and realize my Programe for
unusel 3d MEMS.
Best Regards
Sergey Soukhoveev
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