hi

You may see "Microsystem Design" by Stephen D. Senturia.

regards
ashish


--- LEOW Cheah Wei  wrote:
> Dear all,
>
>      i understand that in MUMPS process if we deposit metal ontop a
> cantilever beam, upon released, it will curl upward.
>      can anybody point me to any publication which specific
> interest in
> computing the radius of curvature in this phenomenm? (e.g, paper,
> text book,
> website)
>        thank you
>
> LEOW Cheah Wei
> postgraduate student
> Univerisiti Teknologi Malaysia
> http://www.geocities.com/cheah_wei
>
> [demime 0.98e removed an attachment of type image/gif]
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