This will probably depend on the metal and the deposition conditions.  When I
deposit Ti/Au on cantilevers they curl down, suggesting a compressive stress
in the metal bilayer.  After heating, the stress goes tensile and the
cantilevers curl up.


>>> [email protected] 01/18/02 12:55AM >>>
Dear all,

     i understand that in MUMPS process if we deposit metal ontop a
cantilever beam, upon released, it will curl upward.
     can anybody point me to any publication which specific interest in
computing the radius of curvature in this phenomenm? (e.g, paper, text book,
website)
       thank you

LEOW Cheah Wei
postgraduate student
Univerisiti Teknologi Malaysia
http://www.geocities.com/cheah_wei

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