hi...............all...............

i am using TMAH, Methanol, IPA, H20 as a solvent to etch silicon wafer,
so as to get a 45-V-groove.
however, the surface finish is not good, there are some stripes along
the 45 degree slanted plane.

any suggestion to get a a better surface roughness of 45-V-groove?

thanks heartily,

oscar