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MEMSnet Home: MEMS-Talk: Re: 4620 bubbles
Re: 4620 bubbles
2002-01-19
D Liu
Re: 4620 bubbles
D Liu
2002-01-19
Dear members,

I worked with 4620 resist before and had bubbles
problem. I found using a waiting time after coating
solves my bubble problem.

Best Regards,

Donald Liu
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