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MEMSnet Home: MEMS-Talk: measurement of sidewall roughness
measurement of sidewall roughness
2002-01-23
Emer O'Reilly
2002-01-23
Randall Cha (Dr)
2002-01-24
Vic Kley
2002-01-24
Fabrice Morin
2002-01-25
Vic Kley
2002-01-24
Rod Ruoff
2002-01-24
Vic Kley
2002-01-26
Franck Alexis Chollet (Asst Prof)
2002-01-28
Vic Kley
measurement of sidewall roughness
Emer O'Reilly
2002-01-23
Dear all,

I hope someone can help me with my query. If I get enough responses, I will
collate answers and sent to the message board.
I am interested in carrying out sidewall roughness measurements on my
samples, using AFM. My samples are polymer tracks of various thickness on
silicon and are as yet uncleaved. Has anyone carried out this type of work?
If so I would be grateful to learn about the do's and don'ts.

Thanks in advance.

Emer.


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***
Research Engineer, Nanotechnology Group,
NMRC, University College Cork, Ireland.

Direct line: +353 (0)21 4904182
Fax: +353 (0)21 4270271
www.nmrc.ie
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***

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