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MEMSnet Home: MEMS-Talk: Haze on HF:Nitric etched silicon
Haze on HF:Nitric etched silicon
2002-01-23
Sarah.SHARP@oxinst.co.uk
2002-01-23
Maurice Norcott
Haze on HF:Nitric etched silicon
Sarah.SHARP@oxinst.co.uk
2002-01-23
I am interested in cause of sporadic cloudiness which could be 'haze' on
silicon surfaces etched using dilute HF:Nitric, any insight or useful
references would be gratefully received.

Thanks in advance,

Sarah Sharp
Senior Technologist
Oxford Instruments Analytical



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