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MEMSnet Home: MEMS-Talk: wet etchant of Silicon with etch rate in few nm/min
wet etchant of Silicon with etch rate in few nm/min
2002-01-23
Mohammed Javeed Shaikh
wet etchant of Silicon with etch rate in few nm/min
2002-01-24
Bernard Legrand
Need to remove a couple of thin layers from a GaAs wafer
2002-01-29
Xinbing Liu
wet etchant of Silicon with etch rate in few nm/min
Mohammed Javeed Shaikh
2002-01-23
hello everyone,
    can any one help me with wet etching of silicon. the etchant should etch
apprx at nm/min. For the etchant, positive Photoresist should act as mask.

thank you,
Javeed Shaikh Mohammed




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