Dear Emer,

Sometime back, IBM developed a kind of AFM tip that looks like hammer-head,
which can be used to measure sidewall roughness quantitatively. If my memory
do not fail me, it supposes to read measurements in 2-axis. However, now I do
not know whether they make that kind of tips anymore, and whether any company
is making some eqt that house the tip.

You may like to check out Veeco.

By the way, how deep are you going to check the sidewall profile? If it's
deeper than 6um, then you might have a problem.....

Randall

-----Original Message-----
From: Emer O'Reilly [mailto:emer.oreilly@nmrc.ie]
Sent: Wednesday, January 23, 2002 4:01 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] measurement of sidewall roughness


Dear all,

I hope someone can help me with my query. If I get enough responses, I will
collate answers and sent to the message board.
I am interested in carrying out sidewall roughness measurements on my
samples, using AFM. My samples are polymer tracks of various thickness on
silicon and are as yet uncleaved. Has anyone carried out this type of work?
If so I would be grateful to learn about the do's and don'ts.

Thanks in advance.

Emer.


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***
Research Engineer, Nanotechnology Group,
NMRC, University College Cork, Ireland.

Direct line: +353 (0)21 4904182
Fax: +353 (0)21 4270271
www.nmrc.ie
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***

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