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MEMSnet Home: MEMS-Talk: Thin PMMA layer
Thin PMMA layer
2002-01-24
Matthias Kruse
2002-01-24
Karl Cazzini
Thin PMMA layer
Matthias Kruse
2002-01-24
Hello!

I need an thin layer of PMMA on silicon. Round about 50-100 nm.
Does anybody have an idea?

Thanx a lot


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Dipl.-Chem. Matthias Kruse
Institut fuer Anorganische Chemie
Fachbereich 8
Universitaet Essen
Universitaetsstr. 5-7
45117 Essen

Tel.  +49 (0)201 183-4515
Fax.  +49 (0)201 183-4195
email [email protected]
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