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MEMSnet Home: MEMS-Talk: measurement of sidewall roughness
measurement of sidewall roughness
2002-01-23
Emer O'Reilly
2002-01-23
Randall Cha (Dr)
2002-01-24
Vic Kley
2002-01-24
Fabrice Morin
2002-01-25
Vic Kley
2002-01-24
Rod Ruoff
2002-01-24
Vic Kley
2002-01-26
Franck Alexis Chollet (Asst Prof)
2002-01-28
Vic Kley
measurement of sidewall roughness
Vic Kley
2002-01-24
A great deal of nanotube work has been done here at U.C. Berkeley. Boron NTs
being an especially stiff and appealing candidate. Such nanotubes have been
the subject of issued patents when used as SPM probes so take care.

More important though no such nanotube advances are required. As I said in
my earlier email, sidewall profiling tips and AFM's have been around for
more then a decade (invented by IBM). A sidewall image produced by IBM of an
AMD RAM trench can be viewed and measured (using the demo software available
at the site) at www.gennano.com  go take a look!.

Vic Kley
General Nanotechnology
Berkeley California

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