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MEMSnet Home: MEMS-Talk: palladium etching
palladium etching
2002-01-24
Xing Yang
palladium etching
Xing Yang
2002-01-24
I am looking for wet chemical etching recipe to
etch palladium with photoresist as the mask. If
someone has done this before, I will appeciate
any advice.

Thanks.

Xing Yang

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