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MEMSnet Home: MEMS-Talk: electrostatic pull-in voltage for cantilever beam
electrostatic pull-in voltage for cantilever beam
2002-01-24
LEOW Cheah Wei
electrostatic pull-in voltage for cantilever beam
2002-01-25
Paolo Bondavalli
2002-01-25
Babu(Panduga)
electrostatic pull-in voltage for cantilever beam
Paolo Bondavalli
2002-01-25
Hi,
These are some refs for you,
I hope this can help you,
(+ Performance of Low-Loss RF MEMS Capacitive Switches ;, IEEE Microwave and
guided wave letters, Vol. 8, N.8, 1998).
(+ RF Switches for Reconfigurable Integrated Circuits;, IEEE Transactions on
microwave theory and techniques, Vol. 46, N.11, 1998).
(+ Design of Low Actuation Voltage RF MEMS Switch ;, IEEE  MTT, 2000).
(+ Mechanical design and optimization of capacitive micromachined switch ;,
Sensors and Actuators A, 93, pp273-285, 2001).
Bye,


LEOW Cheah Wei a icrit :

> Dear everybody,
>
>        can somebody post or point to some link on measured data for pull-in
> voltage of a
> 1) cantilever beam
> 2) bilayer cantilver beam (e.g. poly2 with metal from MUMPS and it is
curved
> )
> 3) related structure
>      i'm interested in simulating/modeling the pull in voltage Vs beam
> length. The data will be very useful in verifying the result.
>
> thank you
>
> LEOW Cheah Wei
> master student
> Universiti Teknologi Malaysia
> http://www.geocities.com/cheah_wei
>
> [demime 0.98e removed an attachment of type image/gif]
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Dr. Paolo Bondavalli
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