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MEMSnet Home: MEMS-Talk: measurement of sidewall roughness
measurement of sidewall roughness
2002-01-23
Emer O'Reilly
2002-01-23
Randall Cha (Dr)
2002-01-24
Vic Kley
2002-01-24
Fabrice Morin
2002-01-25
Vic Kley
2002-01-24
Rod Ruoff
2002-01-24
Vic Kley
2002-01-26
Franck Alexis Chollet (Asst Prof)
2002-01-28
Vic Kley
measurement of sidewall roughness
Vic Kley
2002-01-25
Fabrice and Emer

The first link you provided is bogus. The proper link to the paper of
interest is http://www.fujita3.iis.u-tokyo.ac.jp/~limms/

However the paper clearly states that the resolution limit of their reported
method is presently 500nm! This is unusable and again it is silly to
continue looking when in fact the IBM SXM series sidewall profiling AFM
already resolves better then 1nm and has been doing so for a decade.  These
microscopes have been sold and are in use in Japan where apparently they
very much like to reinvent the wheel in collaboration with the French. The
funny thing is the IBM scientist who invented the sidewall profiling AFM
about 13 years ago is a Frenchman!

Vic Kley

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